This instrument has a field-emission electron source for high performance microanalysis. It has an ultra-high-resolution polepice, giving an image resolution of 0.195nm point-to-point, and better than 0.14nm lattice. It has an Oxford Instruments X-ray detector and INCA analyzer for x-ray microanalysis, and a Gatan imaging filter for energy-loss spectroscopy and energy-filtered imaging. It is capable of microanalysis with a spatial resolution of better than 1nm (in ideal samples!)
MIT-CMSE Electron Microscopy/tonygr@MIT.EDU
Document last reviewed September 27th. 2007.