JEOL JSM-5910Scanning Electron Microscope
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The Jeol 5910 is a general purpose SEM, with the following attributes:
Very easy to use
Remotely accessible via the Net
Rontec EDX system for elemental analysis and mapping
Can view the entire surface of a 20cm wafer
SPECIAL FEATURE
JEOL BEI DETECTOR
MIT-CMSE Electron Microscopy/tonygr@MIT.EDU
Document last reviewed September 27th. 2007